Division of Nanoscale Science Institute for Solid State Physics, The University of Tokyo |
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Read more>>Prototyping Printed Board Making System For thin film patterning on SrTiO3 substrates
Prototyping Printed Board Making System For thin film patterning on SrTiO3 substrates
Division of Nanoscale Science Institute for Solid State Physics, The University of Tokyo
FP-21T Precision
Can we apply this for thin films on SrTiO3 substrates? Hall bar and so on… |
Difficulty No. 1
Detection of milling cutter contact with SrTiO3 substrate
Printed board is conductive due to surface thick metal layer (up to 10 µm) and can be detected by electric contact.
Even if conductive film is deposited, it is too thin for electric detection.
Image Detection
Difficulty No. 2
Milling of hard, fragile SrTiO3
Printed board is soft, which includes surface metal layer and plastic board
Milling parameters optimization
Milling parameters
etc.
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Higer rotation speed does not necessarily lead to the fine finishes.
Parameters optimization summary
– | Lower rotation speed is better Although too low speed is unstable to hold constant speed |
Opt.: 20 Krpm |
– | Depth is not so critical Although too deep results in shorter cutter life time |
Opt.: up to 5 µm |
– | Lower lateral milling speed is better | Min.: 0.1 mm/s |
– | Milling cutter diameter dependence is unknown | Hopefully no dependence |
Parameters optimization summary
Superiority of FP-21T Precision
– As the procedure of solid-state science –
- You are able to process easily and dry
- You can omit the photo lithographic process (No need to buy expensive machines)
- You can process it without chemical reagent
- You can process the oxidative product
- You can easily produce Hall bar
- Very precise and accurateRead more>>The relationship among the spindle rotating speed, processing speed, and the tools